Pre anneal
- The Best Solution for Permanent Bonding to Improve Yield.
- Flexible process capability: WoW mode / Pre-anneal mode.
- Superior pressure & temperature uniformity.
- Max. pressure: 0.5MPa
- Max. temperature: 180℃
- Real time process status monitor.
- SECS/GEM compatible.
檔案下載
檔案 |
---|
型錄下載 |