Plasma Treatment System
- Using 13.56MHz RF power supply with automatic matching output to achieve maximum power output.
- Chemical reaction and physical bombardment performed by free radicals and byproducts results in better effect of cleaning.
- Equipped with removable and adjustable cassette to adapt to various sizes of magazines, trays and wafers.
- User friendly touch screen interface.
- Small footprint.
Downloads
| Files |
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| Download Catalog |
