Substrate size：G3.5~G10.5 Temperature range：120℃~450℃ Excellent temperature uniformity：≦±3℃ O2 control：3%~30%, ±1% Cleanliness level：Class 10 Transportation：Robot Recipe edit

MAX. temperature：450℃ Temperature uniformity：±3℃ O2 control：3%~30%, ±1% Humidity control：Absolute humidity 5%~30%, ±1% Cleanliness level：Class 10 Multi-step temperature control Recipe edit

Substrate size：G2~G6 MAX. temperature：600℃ Temperature uniformity：±4℃ Ramp-up/ramp-down speed：≧8℃/min. O2 control：≦100ppm Auto solvent burn off function

Body dimensions：W1400 x D20700 x H1700 (mm) / 8600 KG Winding machine：W1500 x D2250 x H1800 (mm) / 1200 KG Roll Receiver：W1500 x D2250 x H1800 (mm) / 1200 KG Glass substrate：Diameter MAX. Φ500 (mm), diameter φ3 “, φ6” universal, width MAX. Φ550 (mm), thickness 60μm ~ 300μm Electricity：AC380V、3φ、50HZ、147KVA Air pressure：> 6 kgf / cm²

Conveyor speed : 2 ~ 10 m / min. Conveyor width : 280 mm Effective width : 220 mm Pass line height : 770 + 50 mm Dimensions : L / W / H (cm) 120 / 51 / 119

UV lamp intensity : 60/80 W/cm. Conveyor speed : 4 ~ 20 m / min. Conveyor width : 400 mm Effective width : 350 mm Pass line height : 770 + 50 mm Dimensions : L / W / H (cm) 176 / 75 / 135

1.Dominant wavelength DUV：185nm and 254nm EUV：172nm 2.Transportation：Robot or conveyor 3.Effect of cleaning：Contact angle≦5∘ 4.Uniformity of irradiation：≧90% 5.Cleanliness leve：Class 10

1.Substrate width：220mm~600mm 2.Substrate thickness：50µm~200µm (without PF) 3.Conveyor speed：0.5 ~ 5M/min. 4.Rewinding accuracy：≦±0.5 mm 5.Cutting accuracy：≦±0.5 mm 6.Laminating accuracy：≦±1mm 7.No material alarm

1.VOC treatment capacity：40~120M³/min. 2.Size W/L/H(mm)：3250/2350/2100

Delivery speed: 1~5M/min (adjustable) Vacuum range: 0.2~20Torr Pressure pressure: 0~5kg/cm2 Heater: 3.4KW*2